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The Scanning Low Energy Electron Microscopy (SLEEM) Mode in SEM

Published online by Cambridge University Press:  31 July 2006

L Frank  and
I Mullerova
L Frank
Affiliation:
Institute of Scientific Instruments,Czech Repubic
I Mullerova
Affiliation:
Institute of Scientific Instruments,Czech Repubic
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 152 - 153
Copyright
© 2006 Microscopy Society of America

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