Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-13T02:15:12.609Z Has data issue: false hasContentIssue false
  • English
  • Français

Selective Detection of Secondary Electrons in an SEM using a Multi-Channel Detector

Published online by Cambridge University Press:  30 July 2020

Yasuhiro Shirasaki  and
Momoyo Enyama
Yasuhiro Shirasaki
Affiliation:
Hitachi, Ltd., Kokubunji-shi, Tokyo, Japan
Momoyo Enyama
Affiliation:
Hitachi, Ltd., Kokubunji-shi, Tokyo, Japan

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 392 - 393
Check for updates
Copyright
Copyright © Microscopy Society of America 2020

References

Otsuka, et al. , Journal Name 12., 279 (2014).Google Scholar
Suzuki, et al. , Proc. Of SPIE 10145, 101451L-1 (2017).Google Scholar