Hostname: page-component-78c5997874-dh8gc Total loading time: 0 Render date: 2024-11-14T06:35:48.470Z Has data issue: false hasContentIssue false

SIMS on FIB Instruments: a Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics

Published online by Cambridge University Press:  23 September 2015

T. Wirtz
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
D. Dowsett
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
P. Philipp
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
J.-N. Audinot
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
S. Eswara Moorthy
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Philipp, P. et al., Int. J. Mass. Spectrom. 253 (2006) 71.Google Scholar
[2] Wirtz, T. et al., Appl. Phys. Lett. 101 (2012) 041601.Google Scholar
[3] Pillatsch, L. et al., Appl. Surf Sci. 282 (2013) 90.Google Scholar