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Site-specific Transmission Electron Microscope Characterization of Micrometer-sized Particles Using the Focused Ion Beam Lift-out Technique

Published online by Cambridge University Press:  02 February 2002

Janice K. Lomness ,
Lucille A. Giannuzzi  and
Michael D. Hampton
Janice K. Lomness
Affiliation:
Advanced Materials Processing and Analysis Center, Mechanical Materials & Aerospace Engineering, University of Central Florida, 12443 Research Parkway, Suite 305, Orlando, FL 32826
Lucille A. Giannuzzi*
Affiliation:
Advanced Materials Processing and Analysis Center, Mechanical Materials & Aerospace Engineering, University of Central Florida, 12443 Research Parkway, Suite 305, Orlando, FL 32826
Michael D. Hampton
Affiliation:
Advanced Materials Processing and Analysis Center, Mechanical Materials & Aerospace Engineering, University of Central Florida, 12443 Research Parkway, Suite 305, Orlando, FL 32826 Department of Chemistry, University of Central Florida, 4000 Central Florida Boulevard, Orlando, FL 32816
*
*Corresponding author
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Abstract

Micrometer sized particles have been studied to show that a high-quality transmission electron microscope (TEM) specimen can be produced, without the use of embedding media, from a site-specific region of chosen particles using the focused ion beam (FIB) lift-out (LO) technique. The uniqueness of this technique is that site-specific TEM LO specimens may be obtained from particles and from regions which are smaller than the conventional ∼10–20 μm × 5 μm × ∼0.1 μm dimensions of the LO specimen. The innovative FIB LO procedures are described in detail and TEM images of electron transparent specimens obtained from specific micrometer-sized particles are presented.

Keywords

micrometer powder particlesfocused ion beamsite-specifictransmission electron microscope specimen preparationtransmission electron microscope analysis of micrometer-sized particlestransmission electron microscopy
Type
Research Article
Information
Microscopy and Microanalysis , Volume 7 , Issue 5 , September 2001 , pp. 418 - 423
Copyright
Copyright © Microscopy Society of America 2001

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