Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-28T01:45:41.039Z Has data issue: false hasContentIssue false
  • English
  • Français

Spatial Distribution Maps for Atom Probe Tomography

Published online by Cambridge University Press:  14 November 2007

Brian P. Geiser ,
Thomas F. Kelly ,
David J. Larson ,
Jason Schneir  and
Jay P. Roberts
Brian P. Geiser
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
Thomas F. Kelly
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
David J. Larson
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
Jason Schneir
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
Jay P. Roberts
Affiliation:
Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711-4951, USA
Get access

Abstract

A real-space technique for finding structural information in atom probe tomographs, spatial distribution maps (SDM), is described. The mechanics of the technique are explained, and it is then applied to some test cases. Many applications of SDM in atom probe tomography are illustrated with examples including finding crystal lattices, correcting lattice strains in reconstructed images, quantifying trajectory aberrations, quantifying spatial resolution, quantifying chemical ordering, dark-field imaging, determining orientation relationships, extracting radial distribution functions, and measuring ion detection efficiency.

Keywords

atom probe tomography (APT)spatial distribution maps (SDM)Fourier analysisspatial resolutiontrajectory aberrationcrystal structure
Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue 6: Special Issue: Atom Probe Tomography , December 2007 , pp. 437 - 447
Copyright
© 2007 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Bas, P., Bostel, A., Deconihout, B. & Blavette, D. (1995). A general protocol for the reconstruction of 3d atom probe data. Appl Surf Sci 87/88, 298–304.CrossRefGoogle Scholar
Camus, P.P., Larson, D.J. & Kelly, T.F. (1995). A method for reconstruction and locating atoms on the crystal lattice in three-dimensional atom probe data. Appl Surf Sci 87/88, 305–310.CrossRefGoogle Scholar
Cerezo, A., Abraham, M., Lane, H., Larson, D.J., Thuvander, M., Seto, K., Warren, P.J. & Smith, G.D.W. (1999). Three-dimensional atomic scale analysis of interfaces. Electron Microscopy and Analysis 1999. Instrum Phys Conf Ser 161, 29–34.Google Scholar
Chung, T.J. (2007). General Continuum Mechanics, 2nd ed. New York: Cambridge University Press.
Kelly, T.F., Geiser, B.P. & Larson, D.J. (2007). Definition of spatial resolution in atom probe tomography. Microsc Microanal 13(Suppl 2), 1604CD–1605CD.CrossRefGoogle Scholar
Larson, D.J. & Kelly, T.F. (2006). Nanoscale analysis of materials using a local-electrode atom probe. Microsc Anal 78, 43–46.Google Scholar
Marquis, E.A. & Seidman, D.N. (2004). Nanostructural evolution of Al3Sc precipitates in an Al-Sc-Mg alloy by three-dimensional atom probe microscopy. Surf Interface Anal 36, 559–563.CrossRefGoogle Scholar
Marquis, E.A., Seidman, D.N. & Dunand, D.C. (2002). Precipitation strengthening at ambient and elevated temperatures of heat-treatable Al(Sc) alloys. Acta Mat 50, 4021–4035.Google Scholar
Miller, M.K. (2000). Atom Probe Tomography, Analysis at the Atomic Level. New York: Kluwer Academic/Plenum Publishers.CrossRef
Miller, M.K., Cerezo, A., Hetherington, M. & Smith, G.D.W. (1996a). Atom Probe Field Ion Microscopy. Oxford, UK: Oxford University Press.
Miller, M.K., Cerezo, A., Hetherington, M. & Smith, G.D.W. (1996b). Atom Probe Field Ion Microscopy. Oxford, UK: Oxford University Press, pp. 194–196.
Spence, J.C.H. (2003). High-Resolution Electron Microscopy, 3rd ed. New York: Oxford University Press, pp. 301–305.
Thompson, K., Bunton, J.H., Kelly, T.F. & Larson, D.J. (2006). Characterization of ultra low energy implanted dopants with the 3-D local electrode atom probe. J Vac Sci Technol B 24, 421–427.CrossRefGoogle Scholar
van Dalen, M.E., Dunand, D.C. & Seidman, D.N. (2006). Nanoscale precipitation and mechanical properties of Al-0.06 at.% Sc alloys microalloyed with Yb or Gd. J Mat Sci 41, 7814–7823.Google Scholar
Vurpillot, F., Da Costa, G., Menand, A. & Blavette, D. (2001). Structural analyses in three-dimensional atom probe: A Fourier transform approach. J Microsc 203, 295–302.CrossRefGoogle Scholar
Vurpillot, F., De Geuser, F., Da Costa, G. & Blavette, D. (2004). Application of Fourier transform and autocorrelation to cluster identification in the three-dimensional atom probe. J Microsc 216, 234–240.CrossRefGoogle Scholar
Vurpillot, F., Renaud, L. & Blavette, D. (2003). A new step towards the lattice reconstruction in 3DAP. Ultramicroscopy 95, 223–229.CrossRefGoogle Scholar

Geiser et al

Figure 5

Download Geiser et al(Video)
Video 6.9 MB
Supplementary material: Image

Geiser et al

Figure 6

Download Geiser et al(Image)
Image 1.5 MB

Geiser et al

Figure 10

Download Geiser et al(Video)
Video 5.9 MB