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Structural Analysis of Threading Dislocations in AlN Thin Films

Published online by Cambridge University Press:  03 August 2008

Y Tokumoto ,
N Shibata ,
T Mizoguchi ,
T Yamamoto  and
Y Ikuhara
Y Tokumoto
Affiliation:
University of Tokyo, Japan
N Shibata
Affiliation:
University of Tokyo, Japan
T Mizoguchi
Affiliation:
University of Tokyo, Japan
T Yamamoto
Affiliation:
University of Tokyo, Japan
Y Ikuhara
Affiliation:
University of Tokyo, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 258 - 259
Copyright
© 2008 Microscopy Society of America

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