Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-14T07:04:44.355Z Has data issue: false hasContentIssue false
  • English
  • Français

Study of Point Spread in the Aberration-Corrected Transmission Electron Microscopy

Published online by Cambridge University Press:  07 July 2014

Binghui Ge ,
Yumei Wang ,
Yunjie Chang  and
Yuan Yao
Binghui Ge*
Affiliation:
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, People’s Republic of China
Yumei Wang
Affiliation:
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, People’s Republic of China
Yunjie Chang
Affiliation:
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, People’s Republic of China
Yuan Yao
Affiliation:
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, People’s Republic of China
*
*Corresponding author. bhge@iphy.ac.cn
Get access

Abstract

High precision determination of atomic position is necessary for quantitative electron microscopy so that small width of peaks, which represent atoms in structural images, adequate resolution, and sufficiently strong image contrast are needed. The width of peak is usually determined by the point spread (PS) of instruments, but the PS of objects should also be taken into consideration in aberration-corrected transmission electron microscopy when point resolution of a microscope reaches the sub-angstrom scale, and thus the PS of the instrument is comparable with that of the object. In this article, PS is investigated by studying peak width with variation of atomic number, sample thickness, and spherical aberration coefficients in both negative Cs (NCSI) and positive Cs imaging (PCSI) modes by means of dynamical image simulation. Through comparing the peak width with various atomic number, thickness, and values of spherical aberration, NCSI mode is found to be superior to PCSI considering the smaller width.

Keywords

point spreadpeak widthaberration-corrected transmission electron microscopyquantitative electron microscopynegative Cs imagingpositive Cs imaging
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 20 , Issue 5 , October 2014 , pp. 1447 - 1452
Copyright
© Microscopy Society of America 2014 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Bonhomme, P. & Beorchia, A. (1983). The specimen thickness effect upon the electron microscope image contrast transfer of amorphous objects. J Phys D Appl Phys 16(5), 705–713.CrossRefGoogle Scholar
Cowley, J.M. & Moodie, A.F. (1957). The scattering of electrons by atoms and crystals. I. A new theoretical approach. Acta Cryst 10, 609–619.CrossRefGoogle Scholar
Doyle, P.A. & Turner, P.S. (1968). Relativistic Hartree-Fock X-ray and electron scattering factors. Acta Cryst 24(3), 390–397.CrossRefGoogle Scholar
Ge, B., Wang, Y., Li, F., Luo, H., Wen, H., Yu, R., Cheng, Z. & Zhu, J. (2013). Determination of incommensurate modulated structure in Bi2Sr1.6La0.4CuO6+δ by aberration-corrected transmission electron microscopy. arXiv:1209.1160.Google Scholar
Jia, C.L., Houben, L., Thust, A. & Barthel, J. (2010). On the benefit of the negative-spherical-aberration imaging technique for quantitative HRTEM. Ultramicroscopy 110(5), 500–505.CrossRefGoogle Scholar
Jia, C.L., Lentzen, M. & Urban, K. (2003). Atomic-resolution imaging of oxygen in perovskite ceramics. Science 299(5608), 870–873.CrossRefGoogle ScholarPubMed
Jia, C.L., Lentzen, M. & Urban, K. (2004). High-resolution transmission electron microscopy using negative spherical aberration. Microsc Microanal 10(2), 174–184.CrossRefGoogle ScholarPubMed
Jia, C.L. & Urban, K. (2004). Atomic-resolution measurement of oxygen concentration in oxide materials. Science 303(5666), 2001–2004.CrossRefGoogle ScholarPubMed
Kirkland, E.J. (2010). Advanced Computing in Electron Microscopy. New York: Springer.CrossRefGoogle Scholar
Lentzen, M. (2008). Contrast transfer and resolution limits for sub-angstrom high-resolution transmission electron microscopy. Microsc Microanal 14(1), 16–26.CrossRefGoogle ScholarPubMed
Lentzen, M., Jahnen, B., Jia, C.L., Thust, A., Tillmann, K. & Urban, K. (2002). High-resolution imaging with an aberration-corrected transmission electron microscope. Ultramicroscopy 92(3–4), 233–242.CrossRefGoogle ScholarPubMed
Li, F.H. & Tang, D. (1985). Pseudo-weak-phase-object approximation in high-resolution electron-microscopy. I. Theory. Acta Cryst A41, 376–382.CrossRefGoogle Scholar
Scherzer, O. (1949). The theoretical resolution limit of the electron microscope. J Appl Phys 20, 20–29.CrossRefGoogle Scholar
Van Aert, S., den Dekker, A.J., Van Dyck, D. & van den Bos, A. (2002). High-resolution electron microscopy and electron tomography: Resolution versus precision. J Struct Biol 138(1–2), 21–33.CrossRefGoogle ScholarPubMed
Van Dyck, D. & Chen, J.H. (1999). A simple theory for dynamical electron diffraction in crystals. Solid State Commun 109(8), 501–505.CrossRefGoogle Scholar
Yu, R., Lentzen, M. & Zhu, J. (2011). Effective object planes for aberration-corrected transmission electron microscopy. Ultramicroscopy 112(1), 15–21.CrossRefGoogle Scholar