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T- SEM: Quantitative Composition and Structure Analysis of FIB lamellae in SEM

Published online by Cambridge University Press:  22 July 2022

Meiken Falke ,
Purvesh Soni  and
Anna Mogilatenko
Meiken Falke*
Affiliation:
Bruker Nano GmbH, Berlin, Germany
Purvesh Soni
Affiliation:
Bruker Nano GmbH, Berlin, Germany
Anna Mogilatenko
Affiliation:
Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Berlin Germany Humboldt Universität zu Berlin, Germany
*
*Corresponding author: meiken.falke@bruker.com

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 58 - 59
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Copyright
Copyright © Microscopy Society of America 2022

References

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