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A Three-Dimensional Reconstruction Algorithm for Scanning Transmission Electron Microscopy Data from a Single Sample Orientation

Published online by Cambridge University Press:  24 June 2022

Hamish G. Brown*
Affiliation:
National Center for Electron Microscopy Facility, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
Philipp M. Pelz
Affiliation:
National Center for Electron Microscopy Facility, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA
Shang-Lin Hsu
Affiliation:
National Center for Electron Microscopy Facility, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA
Zimeng Zhang
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA
Ramamoorthy Ramesh
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA Department of Physics, University of California, Berkeley, CA 94720, USA
Katherine Inzani
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
Evan Sheridan
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA Theory and Simulation of Condensed Matter, Department of Physics, King's College London, The Strand, London WC2R 2LS, UK
Sinéad M. Griffin
Affiliation:
Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
Marcel Schloz
Affiliation:
Department of Physics & IRIS Adlershof, Humboldt-Universität zu Berlin, Newtonstraße 15, 12489 Berlin, Germany
Thomas C. Pekin
Affiliation:
Department of Physics & IRIS Adlershof, Humboldt-Universität zu Berlin, Newtonstraße 15, 12489 Berlin, Germany
Christoph T. Koch
Affiliation:
Department of Physics & IRIS Adlershof, Humboldt-Universität zu Berlin, Newtonstraße 15, 12489 Berlin, Germany
Scott D. Findlay
Affiliation:
School of Physics and Astronomy, Monash University, Clayton, VIC 3800, Australia
Leslie J. Allen
Affiliation:
School of Physics, University of Melbourne, Parkville, VIC 3010, Australia
Mary C. Scott
Affiliation:
National Center for Electron Microscopy Facility, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA
Colin Ophus
Affiliation:
National Center for Electron Microscopy Facility, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
Jim Ciston*
Affiliation:
National Center for Electron Microscopy Facility, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
*
*Corresponding author: Hamish G. Brown, E-mail: hgbrown@unimelb.edu.au; Jim Ciston, E-mail: JCiston@lbl.gov
*Corresponding author: Hamish G. Brown, E-mail: hgbrown@unimelb.edu.au; Jim Ciston, E-mail: JCiston@lbl.gov
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Abstract

Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data. We apply the approach to a lead iridate, Pb$_2$Ir$_2$O$_7$, and yttrium-stabilized zirconia, Y$_{0.095}$Zr$_{0.905}$O$_2$, heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction. We demonstrate that Pb–Ir atomic columns are visible in the uppermost layers of the reconstructed volume. We compare this approach to the alternative techniques of depth sectioning using differential phase contrast scanning transmission electron microscopy (DPC-STEM) and multislice ptychographic reconstruction.

Type
Software and Instrumentation
Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press on behalf of the Microscopy Society of America

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Footnotes

Current address: Ian Holmes Imaging Centre, Bio21 Molecular Science and Biotechnology Institute, the University of Melbourne, Parkville, VIC 3052, Australia.

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