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Using Electron Diffraction Techniques, CBED and N-PED to measure Strain with High Precision and High Spatial Resolution

Published online by Cambridge University Press:  23 September 2015

J.L. Rouviere ,
Y. Martin ,
N. Bernier ,
M. Vigouroux ,
D. Cooper  and
J.M. Zuo
J.L. Rouviere
Affiliation:
Univ. Grenoble Alpes, INAC-SP2M, F-38000 Grenoble, France .CEA, INAC-SP2M, F-38000 Grenoble, France
Y. Martin
Affiliation:
Univ. Grenoble Alpes, INAC-SP2M, F-38000 Grenoble, France .CEA, INAC-SP2M, F-38000 Grenoble, France
N. Bernier
Affiliation:
.CEA, LETI, Minatec campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
M. Vigouroux
Affiliation:
.CEA, LETI, Minatec campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
D. Cooper
Affiliation:
.CEA, LETI, Minatec campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France
J.M. Zuo
Affiliation:
.Univ Illinois, Dept Mat Sci & Engn, 1304 W Green St, Urbana, IL 61801 USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2209 - 2210
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Ghani, T, et al, IEDM Techn. Dig (2003). p. 11.6.1.Google Scholar
[2] Martin, Y, et al, accepted in. Ultramicroscopy..Google Scholar
[3] Beche, A., et al, Ultramicroscopy 131 (2013) 10.Google Scholar
[4] Rouviere, J.L., et al, Appl. Phys. Lett. 103 (2013) 241913.Google Scholar