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Wavelength Dispersive Spectrometer and Energy Dispersive Spectrometer Automation: Past and Future Development

Published online by Cambridge University Press:  02 February 2002

Jon J. McCarthy  and
John J. Friel
Jon J. McCarthy*
Affiliation:
Research and Development Department, NORAN Instruments Inc., 2551 West Beltline Highway, Middleton WI 53562
John J. Friel
Affiliation:
Research Department, Princeton Gamma-Tech, Inc., 1026 Route 518, Rocky Hill, NJ 08553-1031
*
*Corresponding author
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Abstract

As part of the Microbeam Analysis Society (MAS) symposium marking 50 years of electron microprobe analysis, this article reviews the important advances made over the decades to the automation of data collection and computerized analysis of data from the electron microprobe. Out of many innovations that contributed to the advance of microprobe automation, we have chosen to focus on a few developments that the authors feel represent the major trends in advancement of the “state of the art” of this instrumentation. After providing brief summaries of the three generations of advances in the hardware and software of automation systems, several key applications developments are described, followed by our prediction of which current developments may impact the future automation of the microprobe.

Keywords

electron microprobe analysisautomationquantitative analysisenergy dispersive spectroscopywavelength dispersive spectroscopylight element analysisarea analysis
Type
Research Article
Information
Microscopy and Microanalysis , Volume 7 , Issue 2 , March 2001 , pp. 150 - 158
Copyright
Copyright © Microscopy Society of America 2001

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