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An Aberration Corrected (S)TEM Microscope for Nanoresearch

Published online by Cambridge University Press:  14 March 2018

S. Kujawa ,
B. Freitag  and
D. Hubert
S. Kujawa*
Affiliation:
FEI Company, Eindhoven, The Netherlands
B. Freitag
Affiliation:
FEI Company, Eindhoven, The Netherlands
D. Hubert
Affiliation:
FEI Company, Eindhoven, The Netherlands
*
stephan.kujawa@feico.com

Extract

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The continued focus on improving materials, combined with the fact that it is now commonly understood that material properties are affected by characteristics at the atomic level, give rise to the need to characterize and image at the best resolutions possible. The (Scanning) Transmission Electron Microscope ((S)TEM) has the capability to image structures with atomic resolution and provides, at the same time, information on the chemical composition, bonding and electronic structure of the material. The nanoresearcher's continued need for the ultimate resolution has accelerated the development of next generation electron optics and technology.

Type
Research Article
Information
Microscopy Today , Volume 13 , Issue 4 , July 2005 , pp. 16 - 21
Copyright
Copyright © Microscopy Society of America 2005

References

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