Depth Information Available from the Backscattered Electron Signal

Extract

Although the secondary electron (SE) signal is still the most commonly used signal in scanning electron microscopes (SEMs), the backscattered electron (BSE) signal is now in wide use. Imaging both atomic number and surface topography have been the major applications of BSE detectors, with some applications in channelling, magnetic contrast and similar specialized applications. Over the last few years, low voltage BSE imaging has been used for imaging surface features to a depth of a few nm. But the BSE signal contains much more information and new techniques are being developed to take advantage of its versatility.