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The Difference Between Calibration and Image Linearity

Published online by Cambridge University Press:  14 March 2018

Douglas Hansen*
Affiliation:
MOXTEK, INC.

Extract

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In my last article, I discussed the need for scheduled system checks on scanning electron microscopes. The article used an experience at a local SEM laboratory to point out the importance of monitoring your instrument by performing simple but regular system performance evaluations.

In this article I will discuss some principles behind the performance of imaging systems such as scanning electron and scanning probe microscopes. We will talk about the concepts of image linearity and dimensional calibration.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 1996