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Published online by Cambridge University Press: 14 March 2018
In my last article, I discussed the need for scheduled system checks on scanning electron microscopes. The article used an experience at a local SEM laboratory to point out the importance of monitoring your instrument by performing simple but regular system performance evaluations.
In this article I will discuss some principles behind the performance of imaging systems such as scanning electron and scanning probe microscopes. We will talk about the concepts of image linearity and dimensional calibration.