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EBSD Sample Preparation: Techniques, Tips, and Tricks

Published online by Cambridge University Press:  14 March 2018

Matthew M. Nowell ,
Ronald A. Witt  and
Brian W. True
Matthew M. Nowell*
Affiliation:
EDAX-TSL, 392 E 12300 S, Draper, UT 84020
Ronald A. Witt
Affiliation:
EBSD Analytical, 2044 N1100E, LehiUT 84043
Brian W. True
Affiliation:
EDAX-TSL, 392 E 12300 S, Draper, UT 84020
*
matt.nowell@ametek.com

Extract

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Automated analysis of Electron Backscatter Diffraction (EBSD) patterns for orientation imaging and phase identification in materials and earth sciences has become a widely accepted microstructural analysis tool. To briefly review, EBSD is a scanning electron microscope (SEM) based technique where the sample is tilted approximately 70 degrees and the electron beam is positioned in an analytical spot-mode within a selected grain. An EBSD pattern is formed due to the diffraction of the electron beam by select crystallographic planes within the material. The EBSD pattern is representative of both the phase and crystallographic orientation of the selected area. The pattern is imaged by a phosphor screen and recorded with a digital CCD camera and then analyzed.

Type
Research Article
Information
Microscopy Today , Volume 13 , Issue 4 , July 2005 , pp. 44 - 49
Copyright
Copyright © Microscopy Society of America 2005

References

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