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A FIB Micro-Sampling Technique for Three-Dimensional Characterization of a Site-Specific Defect

Published online by Cambridge University Press:  14 March 2018

Toshie Yaguchi ,
Yasushi Kuroda ,
Mitsuru Konno ,
Takeo Kamino ,
Tsuyohsi Ohnishi ,
Takahito Hashimoto ,
Kaoru Umemura  and
Kyoichiro Asayama
Toshie Yaguchi
Affiliation:
Hitachi Science Systems, Ltd., Japan
Yasushi Kuroda
Affiliation:
Hitachi Science Systems, Ltd., Japan
Mitsuru Konno
Affiliation:
Hitachi Science Systems, Ltd., Japan
Takeo Kamino
Affiliation:
Hitachi Science Systems, Ltd., Japan
Tsuyohsi Ohnishi
Affiliation:
Hitachi High-Technologies Corporation, Japan
Takahito Hashimoto
Affiliation:
Hitachi High-Technologies Corporation, Japan
Kaoru Umemura
Affiliation:
Hitachi High-Technologies Corporation, Japan
Kyoichiro Asayama
Affiliation:
Renesas Technology Corp., Japan

Extract

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In characterization or failure analysis of new materials and semiconductor devices, the requirements for three dimensional observation and analysis are rapidly increasing. We discuss techniques for specimen preparation, three-dimensional observation, and elemental analysis of semiconductor devices that we developed using a system consisting of a dedicated focused ion beam (FIB) instrument and a scanning transmission electron microscope (STEM). The system utilizes a FIB-STEM compatible specimen holder with a specially designed rotation mechanism, which allows 360° rotation of a specimen on a conical stage (needle stub) around the ion beam axis of the FIB system and 360° rotation perpendicular to the electron beam in the STEM. A piece of sample (micro sample) is extracted from a specific-site by the micro-sampling technique and mounted on the needle stub. Instruments used in the study are the Hitachi FB-2100 FIB system with a micro-sampling attachment and the HD-2300 field emission 200kV STEM.

Type
Research Article
Information
Microscopy Today , Volume 12 , Issue 6 , November 2004 , pp. 26 - 29
Copyright
Copyright © Microscopy Society of America 2004

References

1) Yaguchi, T., Konno, M., Kamino, T., Hashimoto, T., Ohnishi, T., Umemura, K. and Asayama, K., Proc. Microsc. Microanal. 9 (Suppl .2) (2003) 118–119.CrossRefGoogle Scholar
2) Yaguchi, T., Konno, M., Kamino, T., Hashimoto, T., Ohnishi, T. and Umemura, K. Proc. Microsc. Microanal. 10 (Suppl .2) (2004) 1164–1165.Google Scholar
3) Ohnishi, T. and Ishitani, T., US patent 5270552.Google Scholar
4)Tomimatsu et al. US patent 6538254.Google Scholar