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Improving EDS For Low Energy X-Rays Under 1000eV Using an Attachable Detector Optic

Published online by Cambridge University Press:  14 March 2018

David O’Hara*
Affiliation:
Parallax Research, Inc., Tallahassee, FL
Greg Brown
Affiliation:
Parallax Research, Inc., Tallahassee, FL
Eric Lochner
Affiliation:
Parallax Research, Inc., Tallahassee, FL

Extract

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Although considerable advances have been made in Energy Dispersive Detectors for microanalysis, low energy analysis under 1000eV is still relatively poor due to detector response and inefficient production of low energy x-rays. X-ray optics fabrication methods by O’Hara and measurements by McCarthy et. al. indicated that it should be possible to fabricate x-ray optics that could be used to significantly increase the low energy x-ray flux seen by an EDS detector without increasing the beam current. Such an optic would be useful to increase low energy counts without moving the detector closer, which would simply increase the high energy counts and dead time.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2008

References

[1] McCarthy, J. and McMillan, J.., “Applications of X-ray Optics to Energy Dispersive Spectroscopy”, Microscopy and Micro-Analysis, Vol. 4, pp 632-641, Cambridge University Press, 1998 Google Scholar