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Measuring SPM Piezo Displacement Responses

Published online by Cambridge University Press:  14 March 2018

Heinz Sturm ,
Markus Heyde  and
Klaus Radernann
Heinz Sturm
Affiliation:
Federal institute of Materials Research (BAM), Berlin
Markus Heyde
Affiliation:
Institute of Physical Chemistry, Humboldt University, Berlin
Klaus Radernann
Affiliation:
Institute of Physical Chemistry, Humboldt University, Berlin

Extract

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Scanning Probe Microscopy (SPU) is a versatile tool for the investigations of surfaces. Additionally to the three-dimensional examination of surface topography, local mechanical or electrical properties can be measured1. In this work we present a short contribution on the performance and reliability of piezoelectric transducers in a SPM, which take care of the fine positioning of the tip relative to the sample. Some of the calibration procedures known in literature [cited in 2] are: laser interferometry, scanning a slightly tilted surface, a grid, a crystallographic or artificial step of a known height or by using a reference piezo. To measure slow and fast piezo response simultaneously, we use a non-contact calibration procedure with a high dynamic range (Angstrom to several hundred micrometers) and high frequency range (D.C. to 200 kHz(-3dB)).

Type
Research Article
Information
Microscopy Today , Volume 7 , Issue 4 , May 1999 , pp. 24 - 26
Copyright
Copyright © Microscopy Society of America 1999

References

1. Bovtoun, V.P., Sturm, H., Leshichenko, M.A..Yu. Yakimenko, I., Ferroetectrics 190 (14) (1997), 161–166; M. Munz, H. Sturm, E. Schjlz, 0. Hinrichsen. Composites 4 29A(1998), 1251-1259; H, Strum, Maoromol Symp., subm, Aug. 1998CrossRefGoogle Scholar
2. Heyde, M., Sturm, H., Rademann, K., Surf Inteif. Anal., subin. Sept, 1998, ace, Oct. 1998aGoogle Scholar
3. TopoMetrix Corporation, 5403 Betsy Ross Drive, Santa Clara, CA 95054-1192Google Scholar
4. PI Ceramic GmbH, LindenstraBe, D-07589 Ledertiose, ERG.Google Scholar
5. Model D20-A1-H Fibre Optic Displacement Sensor, Philtec, Inc., P.O. Box 359 Arnoid, MD21012, U.S.A.Google Scholar