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A Novel Gemini® STEM Detector System

Published online by Cambridge University Press:  14 March 2018

Jack Vermeulen  and
Heiner Jaksch
Jack Vermeulen*
Affiliation:
Carl Zeiss SMT Oberkochen, Germany
Heiner Jaksch
Affiliation:
Carl Zeiss SMT Oberkochen, Germany
*
vermeulen@smt.zeiss.com

Extract

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By using a scanning transmission electron microscopy (STEM) detector, the information limit for the Gemini® FESEMs can be extended beyond the nanometer range. A resolution of 0.8 nm at 30kV is now readily attainable and gives additional nanoscale information compared to conventional SEM detectors. The resolving power of the combined FESEM/STEM can be used to save processing time on TEM systems and enables high sample throughput for quality assurance applications and standard type measurements. The transmission mode of the FESEM has the advantages of avoiding chromatic aberration, allowing for a larger aperture so that higher transmission, signal-to-noise ratio and contrast enhancement due to the lower electron energy (10 - 30kV) can be obtained.

Type
Research Article
Information
Microscopy Today , Volume 13 , Issue 3 , May 2005 , pp. 18 - 21
Copyright
Copyright © Microscopy Society of America 2005

References

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