The Scanning Electron Microscope As A Precision Instrument

Extract

I began using scanning electron microscopes to solve problems encountered in the fabrication of x-ray diffraction gratings. Since these diffraction gratings consist of very regular lines and spaces, and produce high contrast images from the SEM. my microscopy work often points out problems with the microscope.

One time, for example, I went to the university SEM lab I often use, and was advised that the microscope was down that day due to major field problems. This lab often had problems with stray fields for reasons no one could explain. Usually I was the only one to complain about stray field distortions since they are most obvious when imaging straight lines at high magnification, but on this occasion, the problem was serious and obvious to all.

The microscope had just been serviced and as the lens coils had been replaced, they were expected to be the cause. The service technician was called in and determined that neither the coils nor the microscope electronics were the problem.