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Effect of rapid thermal treatments on the physical properties ofCobalt Doped ZnO Films

Published online by Cambridge University Press:  01 February 2016

C. Davesnne ,
C. Frilay ,
P. Marie ,
C. Labbé ,
F. Ehre ,
N. Chery  and
X. Portier
C. Davesnne
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
C. Frilay
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
P. Marie
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
C. Labbé
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
F. Ehre
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
N. Chery
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
X. Portier*
Affiliation:
CIMAP, CEA, UMR CNRS 6252, ENSICAEN, UNICAEN 6 Boulevard du Maréchal Juin, 14050 CAEN Cedex, France
*
*(Email: xavier.portier@ensicaen.fr)
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Abstract

Cobalt doped ZnO (ZnO:Co) films with a 1 at% doping rate have been successfullygrown on (100) oriented p type Si substrates by radiofrequency magnetronsputtering. Post annealing treatments at 973 K for various short periods havebeen carried out and structural, optical and electrical properties of the filmshave been investigated. Upon rapid annealing, the dopant distribution in thefilm has been found homogeneous. The annealing improves the (002) texture of thefilm and the mean column width increases with the annealing duration from 60 nmup to 95 nm. The lattice parameter of the ZnO:Co films decreases upon annealingand approaches that of bulk ZnO. The photoluminescence (PL) study reveals thatthe Co2+ ions can be excited directly or through a transfermechanism from the matrix. The PL intensity decreases with the annealing timesuggesting a diffusion process of the dopant impeding theCo2+ emission. At last, the electrical conductivity reachesvalues compatible with potential electroluminescent applications of the ZnO:Cofilms.

Keywords

thin filmoptical propertieselectrical properties
Type
Articles
Information
MRS Advances , Volume 1 , Issue 2: Energy and Sustainability , 2016 , pp. 163 - 168
Copyright
Copyright © Materials Research Society 2016 

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References

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