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Performance Improvement of Graphenic Carbon X-ray Transmission Windows

Published online by Cambridge University Press:  14 March 2016

Sebastian Huebner ,
Natsuki Miyakawa ,
Andreas Pahlke  and
Franz Kreupl
Sebastian Huebner*
Affiliation:
Department of Hybrid Electronic Systems, Technical University of Munich, Arcisstr. 21, 80333 Munich, Germany
Natsuki Miyakawa
Affiliation:
Ketek GmbH, Hofer Str. 3, 81737 Munich, Germany
Andreas Pahlke
Affiliation:
Ketek GmbH, Hofer Str. 3, 81737 Munich, Germany
Franz Kreupl
Affiliation:
Department of Hybrid Electronic Systems, Technical University of Munich, Arcisstr. 21, 80333 Munich, Germany
*
*(Email: sebastian.huebner@tum.de)

Abstract

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Graphenic carbon (GC) x-ray transmission windows for EDX and XRF applications with a high transparency for x-rays below 2.5 keV have been fabricated on 6 inch wafers with a CMOS-compatible CVD process. GC windows with an open diameter of 7.4 mm and a thickness of 770 nm withstand up to 6.5 bars of differential pressure. A high transmissivity of 40 % for fluorine Kα (0.677 keV) radiation is demonstrated for a GC thickness of 650 nm. The GC membranes outperform beryllium (Be) windows, in terms of higher x-ray transmission and better mechanical stability while avoiding the toxicity of Be. Optical profilometry has been employed to visualize a large deformation of the GC layer during the window fabrication. This seems to limit the thickness of the GC windows that can currently be fabricated. A two-step growth process can overcome these limitations and windows with a thickness of up to 6 µm have been realized.

Keywords

x-ray fluorescenceCthin film
Type
Articles
Information
MRS Advances , Volume 1 , Issue 20: Nanomaterials and Synthesis , 2016 , pp. 1441 - 1446
Copyright
Copyright © Materials Research Society 2016 

References

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