Confocal Annular Aperture Microscopy and NAIL Allow High Lateral Resolution in Backside Imaging of Integrated Circuits

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Type: Research/Researchers
Information: MRS Bulletin , Volume 34 , Issue 6: Nanofunctional Materials in Cancer Research , June 2009 , pp. 397

DOI: https://doi.org/10.1557/mrs2009.110 [Opens in a new window]

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Confocal Annular Aperture Microscopy and NAIL Allow High Lateral Resolution in Backside Imaging of Integrated Circuits

Volume 34, Issue 6
Joan J. Carvajal
DOI: https://doi.org/10.1557/mrs2009.110

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Confocal Annular Aperture Microscopy and NAIL Allow High Lateral Resolution in Backside Imaging of Integrated Circuits

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