Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by Crossref.
Wang, Ying-Lang
Tseng, Wei-Tsu
and
Chang, Shih-Chieh
2005.
Chemical–mechanical polish of aluminum alloy thin films: slurry chemistries and polish mechanisms.
Thin Solid Films,
Vol. 474,
Issue. 1-2,
p.
36.