Published online by Cambridge University Press: 21 February 2011
The content of bonded hydrogen in hot filament grown diamond films was determined by Fourier transform Infrared (FTIR) measurements before and after annealing. The quantity of bonded hydrogen was found to remain unchanged on annealing in diamond films with high amounts of microcrystalline diamond and amorphous carbon. The hydrogen content was found to decrease on annealing ∼9 times in diamond film of good crystalline quality. The change of the bulk hydrogen content did not seem to be linked to changes in resistivity of the samples.