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The Development of Scanning Microwave Microscope for High-Throughput Characterization of Dielectric and Conducting Materials at Low Temperatures

Published online by Cambridge University Press:  01 February 2011

Sohei Okazaki ,
Noriaki Okazaki ,
Hidetaka Sugaya ,
Xiaoru Zhao ,
Ken Hasegawa ,
Parhat Ahmet ,
Toyohiro Chikyow ,
Jun Nishimura ,
Tomoteru Fukumura  and
Masashi Kawasaki
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Sohei Okazaki
Affiliation:
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Noriaki Okazaki
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Hidetaka Sugaya
Affiliation:
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Xiaoru Zhao
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Ken Hasegawa
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Parhat Ahmet
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Toyohiro Chikyow
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan.
Jun Nishimura
Affiliation:
Institute for Materials Research, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai 980–8577, Japan.
Tomoteru Fukumura
Affiliation:
Institute for Materials Research, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai 980–8577, Japan.
Masashi Kawasaki
Affiliation:
Institute for Materials Research, Tohoku University, 2–1–1 Katahira, Aoba-ku, Sendai 980–8577, Japan.
Makoto Murakami
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Yuji Mastumoto
Affiliation:
Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Hideomi Koinuma
Affiliation:
Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan. Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan.
Tetsuya Hasegawa
Affiliation:
Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan. Advanced Materials Laboratories, National Institute for Materials Science, 1–1 Namiki, Tsukuba, Ibaraki 305–0044, Japan. Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226–8503, Japan. Department of Chemistry, The University of Tokyo, 7–3–1 Hongo, Bunkyo-ku, Tokyo 113–0033, Japan.
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Abstract

We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 804: Symposium JJ – Combinatorial and Artificial Intelligence Methods in Materials Science II , 2003 , JJ9.21
Copyright
Copyright © Materials Research Society 2004

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References

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