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Dielectric and Ferroelectric Characterization of Sol-Gel Derived Ca-Doped PbTiO3 Thin Films

Published online by Cambridge University Press:  10 February 2011

G. Teowee ,
K.C. McCarthy ,
E.K. Franke ,
J.M. Boulton ,
T.P. Alexander ,
T.J. Bukowski  and
D.R. Uhlmann
G. Teowee
Affiliation:
Donnelly Corporation, 4545 East Fort Lowell, Tucson, AZ 85712
K.C. McCarthy
Affiliation:
Donnelly Corporation, 4545 East Fort Lowell, Tucson, AZ 85712
E.K. Franke
Affiliation:
Donnelly Corporation, 4545 East Fort Lowell, Tucson, AZ 85712
J.M. Boulton
Affiliation:
Donnelly Corporation, 4545 East Fort Lowell, Tucson, AZ 85712
T.P. Alexander
Affiliation:
Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721.
T.J. Bukowski
Affiliation:
Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721.
D.R. Uhlmann
Affiliation:
Department of Materials Science and Engineering, University of Arizona, Tucson, AZ 85721.
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Abstract

A series of sol-gel derived CaTiO3- PbTiO3 thin films ( i.e. Pb1−xCaxTiO3 with x = 0 − 1) was prepared on platinized Si substrates and fired to temperatures ranging from 550C to 650C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 431
Copyright
Copyright © Materials Research Society 1996

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