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Embedded Piezoresistive Microcantilever Sensors: Materials for Sensing Chemical and Biological Analytes

Published online by Cambridge University Press:  01 February 2011

Timothy L. Porter ,
William Delinger  and
Robert L. Gunter
Timothy L. Porter
Affiliation:
Dept. of Physics Northern Arizona University Flagstaff, AZ 86011
William Delinger
Affiliation:
Dept. of Physics Northern Arizona University Flagstaff, AZ 86011
Robert L. Gunter
Affiliation:
Dept. of Physics Northern Arizona University Flagstaff, AZ 86011
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Abstract

We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of volatile organic compounds, industrial chemicals, and biological molecules. The EPM design incorporates a tiny piezoresistive microcantilever embedded or partially embedded into a material sensing layer. The sensing layer material is chosen so as to react to the desired analyte(s), and undergo a minute volumetric or vertical shift in dimension. In the present paper, we present results on the sensing of various VOC's, vaccinia virus in solution, carbon tetrachloride in vapor, and osmolality in human subjects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 872: Symposium J – Micro- and Nanosystems—Materials and Devices , 2005 , J13.18
Copyright
Copyright © Materials Research Society 2005

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References

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