Hostname: page-component-745bb68f8f-b6zl4 Total loading time: 0 Render date: 2025-01-15T07:08:31.858Z Has data issue: false hasContentIssue false
  • English
  • Français

Non-Equilibrium Modeling and Dissipative Structures in Solid Material - Plasma Interactions

Published online by Cambridge University Press:  15 February 2011

Yu.L. Khait
Yu.L. Khait*
Affiliation:
Department of Physics, Ben Gurion University of the Negev, Beer Sheva, Israel.
Get access

Abstract

Topics discussed: (a) The dissipative structure (DS) composed of the plasma bulk (PB), near-to-surface plasma layer (PL), surface and the adjacent material layer (ML) coupled by mass, electric charge, etc. fluxes and applications to plasma deposition. (b) The transient local dissipative structure (TLDS) formed by a single plasma ion impinging on the surface and associated with sputtering, etc.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 30: Symposium L – Plasma Processing and Synthesis of Materials I , 1983 , 263
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Proc. 7th Int. Vac. Congr. and 3rd Int. Conf. on Solid Surfaces (Vienna, Austria 1977.Google Scholar
2. Proc. 4th Int. Symp. on Plasma Chemistry (Zurich, Switzerland 1979).Google Scholar
3. Proc. 5th Int. Symp. on Plasma Chemistry (Edinburgh, U.K. 1981.Google Scholar
4. Abstracts Int. Workshop on Plasma Chemistry in Technology (Ashkelon, Israel 1981).Google Scholar
5. Proc. Int. Coll. on Plasma and Sputtering (Nice, France 1982.Google Scholar
6. Proc. 6th Int. Symp. on Plasma Chemistry (Montreal, Canada 1983).Google Scholar
7. Winters, H.F., Coburn, J.W., Chuong, T.J., Research Report R.J. 3617 (42243) 9/28/82 IBM Research Lab. (San Jose, California, U.S.A.).Google Scholar
8. Flamm, D.L. and Donnelly, V.M., Plasma Chemistry and Plasma Processing 1, 317 (1981).Google Scholar
9. Bell, A.T. and Holluhan, J.R., Techniques and Applications of Plasma Chemistry (Wiley, N.Y. 1974).Google Scholar
10. Khait, Yu.L., Inspektor, A. and Avni, R., Proc. 4th Int. Symp. Plasma Chemistry (Zurich 1978);Google Scholar
10a Thin Solid Films 72, 420 (1980);Google Scholar
10b Invited Paper at the Int. Conf. on Metallurgical Coating (San Diego, U.S.A. 1980.Google Scholar
11. Khait, Yu.L., Carmi, U. and Avni, R., Proc. 6th Int. Symp. Plasma Chemistry (Montreal 1983.Google Scholar
12. Khait, Yu.L., Proc. 4th Int. Symp. Plasma Chemistry (Zurich 1979;Google Scholar
12a Proc. 5th Int. Symp. on Plasma Chemistry (Edinburgh 1981;Google Scholar
12b Proc. 4th Int. Coll. on Plasma and Sputtering (Nice 1982).Google Scholar
13. Khait, Yu.L., Invited Paper at the Int. Workshop on Plasma Technology (Ashkelon 1981.Google Scholar
14. Shkarovsky, I.P., Jonston, T.W. and Bashinsky, M.P., The Particle Kinetics of Plasmas (Addison-Wesley Pub. Co., Reading, Massachusetts 1966).Google Scholar
15. Khait, Yu.L., Abstr. XIV Int. UPAP Conf. on Statistical Physics (Alberta, Canada 1980.Google Scholar
15a Bull. Israel Phys. Soc. 27, 1–13 (1981);Google Scholar
15b 28, B–6 (1982).Google Scholar
16. Khait, Yu.L., J. de Phys. (Paris) C–941 (1980).Google Scholar
17. Khait, Yu.L., Proc. 6th Symp. on Plasma Chemistry (Montreal 1983.Google Scholar
18. Vursel, F.B., Khait, Yu.L., Lysov, G.V., Polak, L.S., Tchervochkin, E.N., Proc. All-Union Conf. on Low Temperature Plasma and Generators (Alma-Ata, U.S.S.R. 1970.Google Scholar
18a Energii, Chimiya Vysokich (Soy. High Energy Chemistry) 5, 105 (1971);Google Scholar
18b 5, 112 (1971).Google Scholar
19. Khait, Yu.L., Non-Stationary Heat and Mass Transfer, Doctor of Science Thesis (USSR Academy of Sciences 1972, Moscow) chap. 9. Pre-print N 01, Plasma Processes Lab., Petrochem. Synthesis Institute, USSR Academy of Sciences, Moscow 1971).Google Scholar
20. Khait, Yu.L. and Biblarz, O., J. Appl. Phys. 50 (1979), p. 4692.Google Scholar
21. Glandsdorf, P. and Prigogine, I., Thermodynamic Theory of Structures, Stability and Fluctuations (Wiley, N.Y. 1971).Google Scholar
22. Nicolis, G. and Prigogine, I., Self-Organization in Non-Equilibrium Systems (Wiley, N.Y. 1977).Google Scholar
23. Prigogine, I., From Being to Becoming (W.H. Freeman and Co., San Francisco 1980).Google Scholar
24. Haken, H., Sinergetics. The Introduction: Non-Equilibruim Phase Transitions and Self-organization in Physics, Chemistry and Biology (Springer-Verlag, Berlin 1977).Google Scholar
25. Tiring, A.M., Phil. Trans. Roy. Soc. B 237, 37 (1952).Google Scholar
26. Neumann, J., Theory of Self-Reqpoducing Automata (Urbana, Univ. of Illinois Press 1966).Google Scholar
27. Khait, Yu.L., Physics Reports (in print).Google Scholar
28. Khait, Yu.L., Physica 103 A, 1 (1980).Google Scholar
29. Khait, Yu.L., Abstr. ESCAPMIG (Essen, W.Germany 1978). Abstr. 1978 Annual Meeting of Austrian Phys. Soc. (Innsbruck 1978).Google Scholar