Hostname: page-component-745bb68f8f-5r2nc Total loading time: 0 Render date: 2025-01-15T06:57:56.462Z Has data issue: false hasContentIssue false
  • English
  • Français

Protonation Effects On PPQ Polymer During HF Lift-Off Process Used In Multichip Module Fabrication.

Published online by Cambridge University Press:  15 February 2011

François Templier ,
J. Torres ,
C. Clarisse  and
J. Palleau
François Templier
Affiliation:
France Telecom, CNET-CNS, BP 98, F38243 Meylan, France.
J. Torres
Affiliation:
France Telecom, CNET-CNS, BP 98, F38243 Meylan, France.
C. Clarisse
Affiliation:
France Telecom, CNET Lannion B, BP 40, F22301 Lannion, France.
J. Palleau
Affiliation:
France Telecom, CNET-CNS, BP 98, F38243 Meylan, France.
Get access

Abstract

The reactions between PPQ and several acidic solutions have been studied. Protonation reactions have been evidenced using U.V.- Visible spectroscopy. PPQ revealed three different states concerning these completely reversible reactions. Each state exhibits a specific colour: Pale yellow (as deposited PPQ), and gold yellow and purple red for, respectively, the first and the second protonation states. Using IR spectroscopy, it has been shown that the protons are fixed at the nitrogen sites of the polymer. A possible degradation of the PPQ related to the protonation reactions is also studied, and thus technological solutions are proposed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 227: Symposium J – Materials Science of High Temperature Polymers for Microelectronics , 1991 , 273
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Templier, F., Torrès, J., Halimaoui, A., Palleau, J. and Oberlin, J.C., to be presented at the 179th Meeting of the Electrochemical Society, Washington DC, May 5–10, 1991.Google Scholar
[2] Grabowska, A., Herbich, J., Kirkor-Kaminska, E. and Pakula, B., J. of Luminescence, 21, 403 (1976).Google Scholar
[3] Beck, S.M. and Brus, L.E., J. Am. Chem. Soc., 103, 2495 (1981).Google Scholar
[4] Waluk, J., Chem. Phys. Letters, 63, 579 (1979).Google Scholar
[5] Herbich, J. and Grabovska, A., Chem. Phys. Letters, 46, 372 (1977).Google Scholar
[6] Jenekhe, S.A. and Johnson, P.O., Macromolecules, 23, 4419 (1990).Google Scholar
[7] Jenekhe, S.A., Macromolecules, 24, 1 (1991).Google Scholar
[8] Kobayashi, Y., Nomizu, T. and Ujihira, Y., J. Am. Chem. Soc., 101, 537 (1979).Google Scholar
[9] Wong, C.P. and Berry, G.C., in “Structure Solubility Relationships in Polymers”, Harris, F.W. and Seymour, R.B. editors, Academic Press, New York 1969, p. 71–88.Google Scholar