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The Role of Precursor Chemistry in the Ferroelectric Properties of Donor Doped Pb(Zr,Ti)O3 Thin Films

Published online by Cambridge University Press:  10 February 2011

Laura Fè ,
B. Malič ,
G. Norga ,
M. Kosec ,
D. J. Wouters ,
T. A. Bartic  and
H. E. Maes
Laura Fè
Affiliation:
IMEC, Kapeldreef 75, B001 Leuven, Belgium, laurafe@imec.be
B. Malič
Affiliation:
Jožef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia
G. Norga
Affiliation:
IMEC, Kapeldreef 75, B001 Leuven, Belgium
M. Kosec
Affiliation:
Jožef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia
D. J. Wouters
Affiliation:
IMEC, Kapeldreef 75, B001 Leuven, Belgium
T. A. Bartic
Affiliation:
IMEC, Kapeldreef 75, B001 Leuven, Belgium
H. E. Maes
Affiliation:
IMEC, Kapeldreef 75, B001 Leuven, Belgium
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Abstract

Modified sol-gel processes have been developed for the preparation of precursor solutions of undoped, La and Ta doped PZT (25/75). These processes use different solvents (methoxyethanol, butoxyethanol) and different lead sources (lead acetate, lead oxide). Due to variations in the structure and in the composition of the solutions, significantly different thermal decomposition behaviors were found. These inevitably affected texture and microstructure of the sol-gel derived thin films, demonstrating the important role of precursor chemistry in the improvement of film properties. In the case of tantalum doped Pt/PZT/Pt ferroelectric capacitors a rectangular hysteresis loop, featuring high Pr, was obtained for one specific precursor chemistry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 369
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

[1]Jaffe, B., Cook, W. and Jaffe, H., “Piezoelelectric Ceramics”, Academic Press, New York (1971).Google Scholar
[2]Pleffer, R. L. and Wilber, W. D., MRS. Symp. Proc. 61, 117 (1995).Google Scholar
[3]Waser, R. and Smyth, D. M. in “Ferroelectric thin films: synthesis and basic properties” edited by Araujo, C. P., Scott, J. F. and Taylor, G. W., Gordon and Breach Publishers (1996).Google Scholar
[4] Desu, S. B., Phys. Stat. Sol. (a) 151, 467 (1995).Google Scholar
[5]“Dopant and microstructure effects on switching properties of PZT thin films”, Brooks, R. Klissourska, PhD thesis N' 1805, Ecole Polytechnique Federale de Lausanne, Switzerland (1998).Google Scholar
[6]Lee, W. I. and Lee, J. K., Material Research Bulletin 30, 10, 1185 (1995).Google Scholar
[7]Peng, M. J., Park, S. E., Markowski, K. A., Yoshikawa, S. and Randall, C. A., J. Am. Ceram. Soc. 79, 2971 (1996).Google Scholar
[8]Dimos, D., Warren, W. L. and Al-Shareef, H. N. in “Thin film ferroelctric materials and device” edited by Ramesh, R., Kluwer Academic Publishers (1997).Google Scholar
[9]Chang, J-F. and Desu, S. B., J. Mater. Res. 9, 4 (1994).Google Scholar
[10]Klissurska, R., Brooks, K. G., Reaney, I. M., Pawlaczyk, C., Kosec, M. and Setter, N., J. Am. Ceram. Soc. 78, 6, 1513 (1995).Google Scholar
[11]Kingon, A. I., Streiffer, S. K., Kim, S.-H. and Thomas, D., to be published in Proceedings of ISAF'98.Google Scholar
[12]Schwartz, R. W., Bunker, B. C., Dimos, D. B., Assink, R. A., Tuttle, B. A., Tallant, D. R. and Weinstock, I. A., Integrated Ferroelectrics 12, 24 (1992).Google Scholar
[13]Schwartz, R. W., Voigt, J. A., Tuttle, B. A., Payne, D.A., Reichert, T. L. and Salla, R. S. Da, J. Mater. Res. 12, 444 (1997).Google Scholar
[14]Malič, B., Kosec, M., Smolej, K. and Stavber, S.., to be published in Proceedings of ISAF'98.Google Scholar
[15]Chen, C., Ryder, D. F. and Spurgeon, W. A., J. Am. Ceram. Soc. 72, 8, 1495 (1989).Google Scholar
[16]Budd, K. D., Dey, S. K. and Payne, D. A., Brit. Ceram. Soc. Proc. 36, 107 (1995).Google Scholar
[17]Wang, H.-W., Hall, D. A. and Sale, F. R., Journal of Thermal Analysis 41, 605 (1994).Google Scholar
[18]Brinker, C. J. and Scherer, G. W. in “Ultrasonic Processing of Ceramics, Glasses, and Composites” edited by Hench, L. L. and Ulrich, D. R., John Wiley & Sons, New York (1984).Google Scholar