Published online by Cambridge University Press: 01 February 2011
We characterize several thin film thermoelectric micro-modules composed of 20 µm-thick elements and designed for cooling applications to identify factors that may limit device performance. Thermoelectric figure-of-merit measurements using the transient Harman technique are compared with maximum cooling data under no heat load. Correlation between the two measurements depending on the location of the parasitic joule heating in the module is analyzed. Near-infrared thermoreflectance is used to examine temperature non-uniformity in the module. The temperature distribution on the metal contacts due to the Peltier and Joule effects is obtained non-destructively through the silicon substrate of an active module.