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Comparative Study of MVHF and RF Deposited Large Area Multi-junction Solar Cells Incorporating Hydrogenated Nano-Crystalline Silicon

Published online by Cambridge University Press:  31 January 2011

Xixiang Xu ,
Yang Li ,
Scott Ehlert ,
Tining Su ,
Dave Beglau ,
David Bobela ,
Guozhen Yue ,
Baojie Yan ,
Jinyan Zhang  and
Arindam Banerjee
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Xixiang Xu
Affiliation:
xxu@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Yang Li
Affiliation:
yli@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Scott Ehlert
Affiliation:
sehlert@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Tining Su
Affiliation:
tsu@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Dave Beglau
Affiliation:
dbeglau@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
David Bobela
Affiliation:
dbobela@nrel.org, National Renewable Energy Laboratory, Golden, Colorado, United States
Guozhen Yue
Affiliation:
gyue@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Baojie Yan
Affiliation:
byan@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Jinyan Zhang
Affiliation:
jzhang@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Arindam Banerjee
Affiliation:
abanerjee@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Jeff Yang
Affiliation:
jyang@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
Subhendu Guha
Affiliation:
sguha@uni-solar.com, United Solar Ovonic LLC, Troy, Michigan, United States
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Abstract

We report our investigations of large area multi-junction solar cells based on hydrogenated nano-crystalline silicon (nc-Si:H). We compared results from cells deposited by RF (13.56 MHz) at lower deposition rate (˜3 Å/s) and by Modified Very High Frequency (MVHF) at higher rate (≥ 10 Å/s). With optimized process conditions and cell structures, we have obtained ˜12% initial small active-area (˜0.25 cm2) efficiency for both RF and MVHF cells and 10˜11% large aperture-area (˜400 cm2) encapsulated MVHF cell efficiency for both a-Si:H/nc-Si:H double-junction and a-Si:H/nc-Si:H/nc-Si:H triple-junction structures on Ag/ZnO coated stainless steel substrate.

Keywords

amorphousSiplasma-enhanced CVD (PECVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1153: Symposium A – Amorphous and Polycrystalline Thin Film Silicon Science and Technology–2009 , 2009 , 1153-A22-02
Copyright
Copyright © Materials Research Society 2009

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References

[1] Yan, B. Yue, G. and Guha, S. Mater. Res. Soc. Symp. Proc. Vol. 989, 2007, p. 335.Google Scholar
[2] Xu, X. Yan, B. Beglau, D. Li, Y. DeMaggio, G. Yue, G. Banerjee, A. Yang, J. Guha, S. Hugger, P. and Cohen, D. Mater. Res. Soc. Symp. Proc. Vol. 1066, 2008, p. 325.Google Scholar
[3] Ganguly, G. Yue, G. Yan, B. Yang, J. Guha, S. Conf. Record of the 2006 IEEE 4th World Conf. on Photovoltaic Energy Conversion, Hawaii, USA, May 7-12, 2006, p.1712.Google Scholar