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Cross-Section Nano-Indentation for Rapid AdhesionEvaluation

Published online by Cambridge University Press:  17 March 2011

S. H. Brongersma ,
Dominiek Degryse ,
Jerome Souiller ,
Bart Vandevelde  and
K. Maex
S. H. Brongersma
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Dominiek Degryse
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Jerome Souiller
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Bart Vandevelde
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
K. Maex
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium K.U.Leuven, ESAT, Kasteelpark Arenberg 10, B-3001 Leuven, Belgium
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Abstract

Cross-section nano-indentation is a technique that consists of cleaving awafer, indenting behind the stack on the side surface causing delamination,and measuring the delaminated area in an optical microscope. It is shown tobe a reliable rapid technique for adhesion evaluation and processoptimization of the SiO2/barrier/copper stack.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 812: Symposium F – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2004 , 2004 , F5.5
Copyright
Copyright © Materials Research Society 2004

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References

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