Hostname: page-component-cd9895bd7-fscjk Total loading time: 0 Render date: 2024-12-29T10:11:33.478Z Has data issue: false hasContentIssue false

Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line

Published online by Cambridge University Press:  01 February 2011

Eva E Simonyi
Affiliation:
simonyi@us.ibm.com, IBM, Research, 1101 Kitchawan Rd., Yorktown Heights, NY, 10598, United States, 718-548-7145
Christos D Dimitrakopoulos
Affiliation:
dimitrak@us.ibm.com, IBM T. J. Watson Research Center, 1101 Kitchawan Rd., Yorktown Heights, NY, 10598, United States
Michael Lane
Affiliation:
mwlane@us.ibm.com, IBM T. J. Watson Research Center, 1101 Kitchawan Rd., Yorktown Heights, NY, 10598, United States
Eric Liniger
Affiliation:
eliniger@us.ibm.com, IBM T. J. Watson Research Center, 1101 Kitchawan Rd., Yorktown Heights, NY, 10598, United States
Willi Volksen
Affiliation:
volksen@almaden.ibm.com, IBM Almaden Research Center, 650 Harry Rd., San Jose, CA, 95120, United States
Get access

Abstract

Reliability is an important requirement for the newly developed porous low-k ILD materials that are being introduced into (BEOL). Dependence of Young's moduli, as measured by nanoindentation technique, on the environment [such as high relative humidity, water immersion and recovery] is presented along with FT-IR spectra for a number of films with different k values. Effect of the moduli changes on cracking behavior is also discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Oliver, W. C. and Pharr, G. M., J. Mat. Res. 7, 1564, (1992)Google Scholar
2 Lawn, B. and Winslaw, K., J. Mat. Sci. 10, 1049, (1975)Google Scholar
3 Stoney, G. G., Proc. R. Soc. London, Ser A, Vol. 82, 172, (1909)Google Scholar
4 Simonyi, E. E., Lane, M., Liniger, E., and Grill, A., Mat. Res. Soc. Symposium F. 2006 Google Scholar
5 Volinsky, A. A., Vella, J. B., and Gerberich, W. W., Thin Solid Films 429, 201, (2003)Google Scholar
6 Cook, R. F. and Liniger, E., J. Electrochem. Soc. 146, 4439, (1999)Google Scholar
7 Simonyi, E.E., Liniger, E., Lane, M., Lin, Q., Dimitrakopoulos, C., and Tyberg, C., Mat. Res. Soc. Symp. Proc. 863, (2005)Google Scholar
8 Baklanov, M. R., O’Dwyer, D., Urbanovitz, A., Demuynick, S., and Hong, E. E., Mat. Res. Soc. Symp. Proc. 914, (2006)Google Scholar