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Effects of Hydrogen Plasma Treatment on Hysteresis Phenomenon and Electrical Properties for Solid Phase Crystallized Silicon Thin Film Transistors

Published online by Cambridge University Press:  31 January 2011

Sung-Hwan Choi ,
Sang-Geun Park ,
Chang-Yeon Kim  and
Min-Koo Han
Sung-Hwan Choi
Affiliation:
cshero@emlab.snu.ac.krhero9396@hanmail.net, Seoul National University, School of Electrical Engineering and Computer Sciences, Seoul, Korea, Republic of
Sang-Geun Park
Affiliation:
psg97@emlab.snu.ac.kr, Seoul National University, School of Electrical Engineering and Computer Sciences, Seoul, Korea, Republic of
Chang-Yeon Kim
Affiliation:
kcyeon@chol.com, Seoul National University, School of Electrical Engineering and Computer Sciences, Seoul, Korea, Republic of
Min-Koo Han
Affiliation:
mkh@snu.ac.kr, Seoul National University, School of Electrical Engineering and Computer Sciences, Seoul, Korea, Republic of
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Abstract

We have investigated the effects of hydrogen plasma treatment on the hysteresis phenomenon and electrical properties of solid phase crystallized silicon thin film transistors (SPC-Si TFTs) employing alternating magnetic field crystallization (AMFC). We employed H2 plasma treatment on the SPC-Si active layer before SiO2 gate insulator deposition. By increasng the power and time duration of H2 plasma treatment, it was observed that hysteresis phenomenon of SPC-Si TFT was suppressed and electrical properties such as threshold voltage, field effect mobility was improved considerably. This is due to role of hydrogen atom by passivating the defects and grain boundary trap states in SPC-Si film. However, relatively high power and long hydrogen plasma treatment (100W, 5 minutes) could degrade the electrical characteristics of the device. SPC-Si TFT for 100W power of PECVD and 3 minutes with the H2 plasma treatment exhibit the significant improvement of electrical characterics (VTH = - 3.85V, μFE = 21.16cm2/Vs), and a smaller hysteresis phenomenon (∆VTH = -0.30V) which is suitable for high quality AMOLED Display.

Keywords

Sithin filmH
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1153: Symposium A – Amorphous and Polycrystalline Thin Film Silicon Science and Technology–2009 , 2009 , 1153-A21-05
Copyright
Copyright © Materials Research Society 2009

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