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High Performance Micromachined Planar Field-Asymmetric Ion Mobility Spectrometers for Chemical and Biological Compound Detection

Published online by Cambridge University Press:  01 February 2011

Raanan A. Miller ,
Angela Zapata ,
Erkinjon G. Nazarov ,
Evgeny Krylov  and
Gary A. Eiceman
Raanan A. Miller
Affiliation:
Sionex Corporation, Wellesley Hills, MA
Angela Zapata
Affiliation:
Charles Stark Draper Laboratory, Cambridge, MA
Erkinjon G. Nazarov
Affiliation:
New Mexico State University, Chemistry and Biochemistry Department, Las Cruces, NM
Evgeny Krylov
Affiliation:
New Mexico State University, Chemistry and Biochemistry Department, Las Cruces, NM
Gary A. Eiceman
Affiliation:
New Mexico State University, Chemistry and Biochemistry Department, Las Cruces, NM
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Abstract

The micromachined Planar High Field Asymmetric Waveform Ion Mobility Spectrometer (PFAIMS) is a novel detector for chemical and biological sensing applications. This detector fills an unmet market need, providing spectrometer capabilities and extremely high sensitivity, at a cost comparable to stand-alone sensors. The PFAIMS is quantitative, and has detection limits down to the parts-per-trillion. The performance of the PFAIMS in a number of applications ranging from industrial to biomedical, where it is used as both a stand alone sensor, and as a gas chromatographic detector are demonstrated. These applications include the detection of xylene isomers and non-invasive medical diagnosis through breath analysis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 729: Symposium U – MEMS and BioMEMS , 2002 , U4.1
Copyright
Copyright © Materials Research Society 2002

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