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Imaging Cross Section of X-ray Multilayer Mirror by Scanning Tunneling Microscope

Published online by Cambridge University Press:  15 February 2011

QI Wang ,
L. V. Knight  and
M. J. Thorne
QI Wang
Affiliation:
Department of Physics and Astronomy, Brigham Young University, Prove, UT 84602
L. V. Knight
Affiliation:
Department of Physics and Astronomy, Brigham Young University, Prove, UT 84602
M. J. Thorne
Affiliation:
Department of Chemistry and Biochemistry, Brigham Young University, Prove, UT 84602
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Extract

Multilayers are used in x-ray optics as mirrors.1 They usually consist of a stack of bi-layers of two different materials. For x-ray optics, the thickness of the bi-layer, or the d-spacing of the multilayer, ranges from 2 nm to 20 nm. Since x-ray multilayers are usually made by evaporation or sputtering technique, most of materials in multilayers are amorphous or polycrystalline.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 213
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1 Barbee, T. W. Jr., Opt. Eng. 25, 899 (1986)Google Scholar
2 Spiller, E., Revue Phys. Appl. 23, 1687 (1988)Google Scholar
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4. Albrektsen, O., Arent, D. J., Meier, H. P., and Salemink, H. W. M., Appl. Phys. Lett. 57, 31 (1990)Google Scholar