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In Situ, Real-Time Curvature Imaging During Chemical Vapor Deposition

Published online by Cambridge University Press:  01 February 2011

David A. Boyd ,
Ashok B. Tripathi ,
Mohamed El-Naggar  and
David G. Goodwin
David A. Boyd
Affiliation:
Division of Engineering and Applied Science, California Institute of Technology Pasadena, CA 91125
Ashok B. Tripathi
Affiliation:
Division of Engineering and Applied Science, California Institute of Technology Pasadena, CA 91125
Mohamed El-Naggar
Affiliation:
Division of Engineering and Applied Science, California Institute of Technology Pasadena, CA 91125
David G. Goodwin
Affiliation:
Division of Engineering and Applied Science, California Institute of Technology Pasadena, CA 91125
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Abstract

Coherent Gradient Sensing (CGS) is a full-field optical technique that produces real-time images of macroscopic wafer curvature, which, for thin films, can be related to stress through Stoney's equation. Here we describe the use of CGS as an in situ diagnostic to observe film stress distributions during chemical vapor deposition. The application of this method to measure oxygen diffusion rates in thin film YBa2Cu3O6+δ(YBCO) and stresses in thin film PbxBa1-xTiO3 (PBT) under chemical vapor deposition (CVD) conditions will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 795: Symposium U – Thin Films - Stresses and Mechanical Properties X , 2003 , U5.31
Copyright
Copyright © Materials Research Society 2004

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