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Investigation of the Pb Depletion in Single and Dual Pulsed Laser Deposited Epitaxial PZT Thin Films and Their Structural Characterization

Published online by Cambridge University Press:  31 January 2011

Devajyoti Mukherjee ,
Robert H Hyde ,
Tara Dhakal ,
Hariharan Srikanth ,
Pritish Mukherjee  and
Sarath Witanachchi
Devajyoti Mukherjee
Affiliation:
dmukherj@mail.usf.edudevajyotim@gmail.com, University of South Florida, Physics, Tampa, Florida, United States
Robert H Hyde
Affiliation:
rhhyde@mail.usf.edu, University of South Florida, Physics, Tampa, Florida, United States
Tara Dhakal
Affiliation:
tdhakal@cas.usf.edu, University of South Florida, Physics, Tampa, Florida, United States
Hariharan Srikanth
Affiliation:
sharihar@cas.usf.edu, University of South Florida, Physics, Tampa, Florida, United States
Pritish Mukherjee
Affiliation:
pritish@cas.usf.edu, University of South Florida, Physics, Tampa, Florida, United States
Sarath Witanachchi
Affiliation:
switanac@cas.usf.edu, University of South Florida, Physics, Tampa, Florida, United States
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Abstract

We have investigated the Pb depletion in laser ablated PZT (PbZr0.52Ti0.48O3) films through a systematic study of PZT target-laser interactions for both single laser and dual-laser ablation methods. The study includes films deposited from a stoichiometric and an excess PbO PZT targets. The films were deposited on single crystal SrTiO3[100] substrates at 550˚C with a background oxygen pressure of 500 mT. Single laser deposited films at a laser fluence of 5J/cm2 produced the highest Pb content while dual-laser ablated films where an excimer and a CO2 pulsed lasers were synchronized for ablation produced high Pb content for an excimer laser fluence of less than 2J/cm2. This enabled the growth of particulate-free PZT films with high Pb content. ICCD imaging of the plasma plumes showed variations in the expansion profiles at different laser fluencies that correlated well with the Pb content observed in the deposited films.

Keywords

laser ablationPbferroelectricity
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1199: Symposium F –Multiferroic and Ferroelectric Materials , 2009 , 1199-F03-37
Copyright
Copyright © Materials Research Society 2010

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References

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