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Laser Ablation Of Solid Ozone

Published online by Cambridge University Press:  10 February 2011

Hidehiko Nonaka ,
Tetsuya Nishiguchi ,
Yoshiki Morikawa ,
Masaharu Miyamoto  and
Shingo Ichimura
Hidehiko Nonaka
Affiliation:
Materials Science Division, Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, lbaraki, 305-8568, Japan
Tetsuya Nishiguchi
Affiliation:
Meidensha Corp. 515 Kaminakamizo Higashimakado, Numazu, Shizuoka 410-8588, Japan
Yoshiki Morikawa
Affiliation:
Meidensha Corp. 515 Kaminakamizo Higashimakado, Numazu, Shizuoka 410-8588, Japan
Masaharu Miyamoto
Affiliation:
Meidensha Corp. 515 Kaminakamizo Higashimakado, Numazu, Shizuoka 410-8588, Japan
Shingo Ichimura
Affiliation:
Frontier Technology Division Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki, 305-8568, Japan
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Abstract

Species ablated from solid ozone by a UV laser were investigated using a time-of-flight method through a quadrupole mass filter. The results show that UV-laser ablation of solid ozone can produce a pulsed ozone beam with a translational energy far above that of room temperature. Highconcentration ozone from an ozone jet generator is solidified on a sapphire substrate attached to a copper block which is cooled to 30 to 60 K on a cryocooler head and the solid ozone is irradiated by pulsed laser light from a KrF laser (248 nm). The ablated species were a mixture of ozone and molecular oxygen as well as atomic oxygen due to photodissociation of ozone. At a substrate temperature of 30 K, the total amount of ablated ozone increases as the laser fluence increases to 13 mJcm−2. Beyond this fluence, enhanced decomposition of ozone occurs. Gaussian fitting of the time-of-flight signals of the ablated ozone reveals an average thermal energy exceeding 1,500 K. The velocity also increases when the laser fluence enters saturation at 2,300 K at 13 mJcm−2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 617: Symposium J – Laser-Solid Interactionsfor Materials Processing , 2000 , J1.3
Copyright
Copyright © Materials Research Society 2000

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References

1 Vanysek, P., Electrochemical series, Handbook of Chemistry and Physics, ed. Lide, D.R. (CRC Press, 1996) pp. 8:20–8:25.Google Scholar
2 Shimizu, T., Hirayama, F., Oka, K., Nonaka, H., Matsuda, M., and Arai, K., Appl. Phys. Lett. 64, 1289 (1994).Google Scholar
3 Lathrop, D.K., Lussek, S.E., and Buhrman, R.A., Appl. Phys. Lett., 51, 1554 (1987).Google Scholar
4 Hosokawa, S. and Ichimura, S., Rev. Sci. Instrum., 62, 1614 (1991).Google Scholar
5 Nakamura, K., Kurokawa, A., and Ichimrua, S., Jpn. J. Appl. Phys. 39 (2000) in press.Google Scholar
6 Kurokawa, A., Nakamura, K., Ichimura, S., and Moon, D. W., Appl. Phys. Lett., 76, 493 (2000).Google Scholar
7 Sekine, S., Ichimura, S., Shimizu, H., and Hashizume, H., Jpn. J Appl. Phys., 33, L387 (1994).Google Scholar
8 Cousins, L.M. and Leone, S.R., Chem. Phys. Lett., 155, 162 (1989).Google Scholar
9 Horvath, M., Bilitzky, L., and Huttner, J., Ozone (Elsevier, 1985) pp. 15.Google Scholar
10 Okabe, H., Photochemistry of Small Molecules (John Wiley & Sons, 1978) pp.237–244. The absorption coefficient therein of 120 atm−1cm−1, 0°C, base 10 and the density of 1.6 gcm−3 (page 22 of ref. 9) were used to estimate the absorption depth.Google Scholar
11 Bemderskii, A.V. and Wight, C.A., J Chem. Phys., 101, 292 (1994).Google Scholar
12 Sparks, R.K., Carlson, L.R., Shobatake, K., Kowalczyk, M.L., and Lee, Y.T., J. Chem. Phys., 72, 1401 (1980).Google Scholar