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Magnetron Sputtering for II-VI Solar Cells: Thinning the CdTe

Published online by Cambridge University Press:  31 January 2011

Victor V. Plotnikov ,
Anthony C. Vasko ,
Alvin D. Compaan ,
Xiangxin Liu ,
Kristopher A. Wieland ,
Ryan M. Zeller ,
Jian Li  and
Robert W. Collins
Victor V. Plotnikov
Affiliation:
vplotni@physics.utoledo.edu, University of Toledo, Physics and Astronomy, Toledo, Ohio, United States
Anthony C. Vasko
Affiliation:
avasko@physics.utoledo.edu, Wright Center for Photovoltaics Innovation and Commercialization, Toledo, Ohio, United States
Alvin D. Compaan
Affiliation:
acompaa@utnet.utoledo.edu, University of Toledo, Physics and Astronomy, Toledo, Ohio, United States
Xiangxin Liu
Affiliation:
xlui@physics.utoledo.edu, University of Toledo, Physics and Astronomy, Toledo, Ohio, United States
Kristopher A. Wieland
Affiliation:
kwieland@physics.utoledo.edu, University of Toledo, Physics and Astronomy, Toledo, Ohio, United States
Ryan M. Zeller
Affiliation:
rzeller@UTNet.UToledo.Edu, University of Toledo, Physics and Astronomy, Toledo, Ohio, United States
Jian Li
Affiliation:
jianli@physics.utoledo, University of Toledo, Physics and Astronomy, Toledo, Ohio, United States
Robert W. Collins
Affiliation:
rcollins@physics.utoledo.edu, University of Toledo, Physics and Astronomy, Toledo, Ohio, United States
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Abstract

Magnetron sputtering (MS) of CdTe and related II-VI materials facilitates low energy ion and electron bombardment that promotes good film growth at substrate temperatures well below those needed for other physical vapor deposition methods. MS also provides good control of deposition rates while allowing scale-up to large areas. In this paper we review the use of MS for deposition of polycrystalline thin films of CdS, CdTe and related materials for solar cells with a focus on reducing the thickness. We relate the deposition conditions and plasma properties determined by Langmuir probe measurements to some of the materials properties of the films through spectroscopic ellipsometry and high resolution electron microscopy. For cells with CdTe layers from 0.35 to 2.5 μm, we have done a first-order optimization of chloride treatment conditions and back contact structure. We discuss the influence of CdTe thickness and post-deposition processing on the efficiency, open-circuit voltage, short-circuit current, and fill factor and show that 10% efficient cells can be fabricated with 0.5 μm of CdTe.

Keywords

thin filmsputteringphotovoltaic
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1165: Symposium M – Thin-Film Compound Semiconductor Photovoltaics–2009 , 2009 , 1165-M09-01
Copyright
Copyright © Materials Research Society 2009

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References

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