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Misfit Dislocations at the Critical Thickness for Ingaas/Gaas Strained Layers

Published online by Cambridge University Press:  25 February 2011

G. S. Green ,
B. K. Tanner ,
A. G. Turnbull ,
S. J. Barnett ,
M. Emeny  and
C. R. Whitehouse
G. S. Green
Affiliation:
Physics Department, University of Durham, South Road, Durham, DH1 3LE, U.K.
B. K. Tanner
Affiliation:
Physics Department, University of Durham, South Road, Durham, DH1 3LE, U.K.
A. G. Turnbull
Affiliation:
Physics Department, University of Durham, South Road, Durham, DH1 3LE, U.K.
S. J. Barnett
Affiliation:
RSRE, St Andrews Road, Great Malvern, Worcs., WR14 3PS, U.K.
M. Emeny
Affiliation:
RSRE, St Andrews Road, Great Malvern, Worcs., WR14 3PS, U.K.
C. R. Whitehouse
Affiliation:
RSRE, St Andrews Road, Great Malvern, Worcs., WR14 3PS, U.K.
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Abstract

The contrast of misfit dislocations in an InGaAs layer, close to the critical thickness and capped with GaAs grown by MBE on a (001) oriented GaAs substrate has been investigated by double axis synchrotron X-radiation topography. The layer thickness variation as a function of position has been measured to a precision of 1A by matching interference fringes observed in the 004 symmetric reflection double crystal rocking curves with simulations. The misfit dislocation density is highly anisotropic, varying from zero to a high value with increasing thickness. The contrast of the dislocations in the 004, 224 and 044 reflections has been examined in detail. All of the long dislocation segments characterized were 60° in character with ½<110> Burgers vectors inclined to the specimen surface. No dislocations were found which did not appear to be of this type. A surprising difference in contrast of the background in the 224 and 224 reflections is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 202: Symposium C – Evolution of Thin Film and Surface Microstructure , 1990 , 507
Copyright
Copyright © Materials Research Society 1991

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References

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