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Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly

Published online by Cambridge University Press:  01 February 2011

Shin’ichi Warisawa ,
Hiroyuki Mino ,
Reo Kometani  and
Sunao Ishihara
Shin’ichi Warisawa
Affiliation:
Department of Mechanical Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo Bunkyo-ku, Tokyo 113-8656, Japan
Hiroyuki Mino
Affiliation:
Department of Mechanical Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo Bunkyo-ku, Tokyo 113-8656, Japan
Reo Kometani
Affiliation:
Department of Mechanical Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo Bunkyo-ku, Tokyo 113-8656, Japan
Sunao Ishihara
Affiliation:
Department of Mechanical Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo Bunkyo-ku, Tokyo 113-8656, Japan
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Abstract

In this paper, we present the possibility of nano-scale patterning on surfaces of 3-D micro structures by means of block copolymer self assembly. We succeeded in forming vertical cylinders on the surfaces of the 3-D micro structures using dip-coat process with Au deposition instead of random copolymers. The material of 3-D structures fabricated by FIB-CVD was diamond-like carbon (DLC) due to selecting phenanthrene as a gas source. Since the surface energy of DLC is low, instead of PS-r-PMMA polymer brush, 100 nm-thick Au films were coated on the surfaces of 3-D structures. PS-b-PMMA (PS:PMMA = 50 kg/mol:21 kg/mol) was dip-coated on the Au coated surfaces and annealed. First, we prepared DLC 60° angled slope with size of 2.5 by 3 μm2. As a result, the vertical cylinders were formed in a similar way regardless of the places, i.e., top, middle and bottom on the slopes. vertical cylinders were formed regularly and densely on the entire slope. In order to investigate the effect of slope angle, we prepared 3-D micro structures with different angled slopes such as 70, 80 and 90°. There was no slope angle specific difference, and vertical cylinders were also formed on each slope.

Keywords

self-assemblynanostructureion-beam assisted deposition
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1312: Symposium HH/II/JJ – Polymer-Based Materials and Composites—Synthesis, Assembly and Applications , 2011 , mrsf10-1312-jj07-02
Copyright
Copyright © Materials Research Society 2011

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References

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