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Orientation Selection in Sol-Gel Derived PZT Thin Films

Published online by Cambridge University Press:  21 March 2011

G. J. Norga  and
Laura Fé
G. J. Norga
Affiliation:
IMEC vzw, Kapeldreef 75, B 3001 Leuven, Belgium
Laura Fé
Affiliation:
IMEC vzw, Kapeldreef 75, B 3001 Leuven, Belgium
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Abstract

Motivated by the growing impact of PZT film orientation on ferroelectric film properties as film thickness is scaled down, we present basic studies on orientation selection in sol-gel derived PZT films, using pre-annealed Pt/Ti electrode layers as a model electrode system. FTIR was used to study, on a real temperature scale, chemical reactions in the films during the initial thermal steps prior to crystallization. We found that the chemical structure of the pyrolyzed film has a much larger impact on orientation selection than has previously been realized. In addition to pyrolysis conditions, the ambient used for the crystallization step was found to play a crucial role in orientation selection. As film thickness decreases, excessive oxygen incorporation in the films is seen to result in the loss of the preferential (111) texture when crystallization is performed in air. By performing crystallizations in N2, 40 nm thick PZT films with a strongly preferential (111) orientation could be obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC9.1.1
Copyright
Copyright © Materials Research Society 2001

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