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Oxide Films for Integrated Capacitors in Thin Film Functional Modules
Published online by Cambridge University Press: 21 March 2011
Abstract
Single oxide films as well as complex oxide films are intensively studied for multi-chip modules with integrated passive functions. In this paper the processing and properties of oxide films such as Ta2O5, TiO2, Nb2O5, Ta2O5 -Al2O3, Ta2O5–Nb2O5 as well as complex oxide films such as BiNbO4 and Ba1划xSrxTiO3 films will be discussed with respect to their integration into thin film functional modules.
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- Copyright © Materials Research Society 2001
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