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Patterning of Single-Walled Carbon Nanotubes Using Wet Chemical Self-Assembling and Photolithographic Technique

Published online by Cambridge University Press:  26 February 2011

Myung-Sup Jung ,
Sung-Ouk Jung ,
Hee-Tae Jung ,
Do Yun Kim  and
Seok Gwang Doo
Myung-Sup Jung
Affiliation:
msjung22@samsung.com, Samsung Advanced Institute of Technology, Materials Center, P.O. Box 111, Suwon, Korea, 440-600, Korea, Republic of, 82-31-280-8264, 82-31-280-9349
Sung-Ouk Jung
Affiliation:
sungouk.jung@samsung.com, Samsung Advanced Institute of Technology, materials Center
Hee-Tae Jung
Affiliation:
heetae@kaist.ac.kr, korea Advanced Institute of Science & Technology, Department of Chemical and Biomolecular Engineering, Korea, Republic of
Do Yun Kim
Affiliation:
doyunkim@samsung.com, Samsung Advanced Institute of Technology, materials Center, Korea, Republic of
Seok Gwang Doo
Affiliation:
sgdoo@samsung.com, Samsung Advanced Institute of Technology, materials Center, Korea, Republic of
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Abstract

Single-walled carbon nanotubes (SWNTs) have been chemically attached with high density onto a patterned substrate. To form the SWNT pattern, the substrate was treated with acid-labile group protected amine, and an amine prepattern was formed using a photolithographic process with a polymeric photo acid generator. The SWNT monolayer pattern was then formed through the amidation reaction between the carboxylic acid groups of carboxylated SWNTs (ca-SWNTs) and the prepatterned amino groups. A high-density multilayer was fabricated via further repeated reaction between the carboxylic acid groups of the ca-SWNTs and the amino groups of the linker with the aid of a condensation agent. Scanning electron microscopy results show that the patterned SWNT films have uniform coverage with high surface density.

Keywords

lithography (deposition)self-assemblyphotochemical
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 901: Symposium R – Assembly at the Nanoscale – Toward Functional Nanostructured Materials , 2005 , 0901-Ra22-33-Rb22-33
Copyright
Copyright © Materials Research Society 2006

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