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Phase Transformation of Smooth Diamond Films Grown by hot Filament Chemical Vapor Deposition on Positively Biased Silicon Substrates.

Published online by Cambridge University Press:  21 February 2011

G. Popovici ,
C. H. Chao ,
M. A. Prelas ,
E. J. Charlson  and
J. M. Meese
G. Popovici
Affiliation:
Nuclear Engineering Department, University of Missouri, Columbia, MO 65211
C. H. Chao
Affiliation:
Electrical Engineering Department, University of Missouri, Columbia, MO 65211
M. A. Prelas
Affiliation:
Nuclear Engineering Department, University of Missouri, Columbia, MO 65211
E. J. Charlson
Affiliation:
Electrical Engineering Department, University of Missouri, Columbia, MO 65211
J. M. Meese
Affiliation:
Electrical Engineering Department, University of Missouri, Columbia, MO 65211
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Abstract

Smooth diamond films have been grown by hot filament chemical vapor deposition under d.c. bias on mirror-polished Si substrates. Films a few micrometers thick were obtained in 30 minutes. Raman spectra showed very broad diamond peaks. X-ray diffraction showed the presence of diamond and also other carbon phase with a line 2.11 Å. With time, the films apparently underwent a phase transformation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 339: Symposium D – Diamond, Silicon Carbide and Nitride Wide Bandgap Semiconductors , 1994 , 325
Copyright
Copyright © Materials Research Society 1994

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References

1. Wild, C., Muller-Sebert, W., Eckermann, T., and Koidl, P., Applications of Diamond Films and Related Materials, Materials Sci. Monographs, vol. 73, (Elsevier Sci. Publishers, 1991) p. 197 Google Scholar
2. Ownby, P. D., Yang, X., and Liu, J., J. Amer. Ceram. Soc. 75, 1876 (1992)Google Scholar
3. Badzian, A. R. and Badzian, T., Diamond and Related Materials, 2, 147 (1993)Google Scholar
4. Barrett, C. and Massalski, T. B., Structure of Metals, Pergamon Press, N. Y. 1980, pp. 486–507 Google Scholar