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Photoactivated Metal-Oxide Gas Sensing Nanomesh by Using Nanosphere Lithography

Published online by Cambridge University Press:  11 September 2014

Yu-Hsuan Ho ,
Tsu-Hung Lin ,
Yi-Wen Chen ,
Wei-Cheng Tian ,
Pei-Kuen Wei  and
Horn-Jiunn Sheen
Yu-Hsuan Ho
Affiliation:
Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan Research Center for Applied Sciences, Academia Sinica, Taipei 115, Taiwan
Tsu-Hung Lin
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
Yi-Wen Chen
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
Wei-Cheng Tian
Affiliation:
Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan
Pei-Kuen Wei
Affiliation:
Research Center for Applied Sciences, Academia Sinica, Taipei 115, Taiwan
Horn-Jiunn Sheen*
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
*
*Email: sheenh@ntu.edu.tw
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Abstract

A photoactivated ZnO nanomesh with precisely controlled dimensions and geometries is fabricated by using nanosphere lithography process. The nanomesh structures effectively increase the surface-to-volume ratio to improve the sensing response under the same testing gas. And the periodical nanostructures also increase the effective light path and lead to more efficient light activation for gas sensing. With the increase of the photoinduced oxygen ions by UV illumination, a distinguished sensing response is observed at room temperature. In the optimized case, the sensing response (△R/R0) of the ZnO nanomesh at the butanol concentration of 500 ppm is 97.5%, which is 4.54 times higher than the unpatterned one.

Keywords

sensornanostructureself-assembly
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1675: Symposium K/RR – Synthesis, Characterization and Applications of Functional Materials—Thin Films and Nanostructures , 2014 , pp. 139 - 144
Copyright
Copyright © Materials Research Society 2014 

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References

REFERENCES

Deen, M.J., Kazemeini, M.H. and Holdcroft, S.: Contact effects and extraction of intrinsic parameters in poly(3-alkylthiophene) thin film field-effect transistors. Journal of Applied Physics 103, 124509 (2008).CrossRefGoogle Scholar
Arafat, M.M., Dinan, B., Akbar, S.A. and Haseeb, A.S.M.A.: Gas Sensors Based on One Dimensional Nanostructured Metal-Oxides: A Review. Sensors 12, 7207 (2012).CrossRefGoogle ScholarPubMed
Wang, C., Yin, L., Zhang, L., Xiang, D. and Gao, R.: Metal Oxide Gas Sensors: Sensitivity and Influencing Factors. Sensors 10, 2088 (2010).CrossRefGoogle ScholarPubMed
Franke, M.E., Koplin, T.J. and Simon, U.: Metal and metal oxide nanoparticles in chemiresistors: does the nanoscale matter? Small 2, 36 (2006).CrossRefGoogle ScholarPubMed
Suehle, J.S., Cavicchi, R.E., Gaitan, M. and Semancik, S.: Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing. Electron Device Letters, IEEE 14, 118 (1993).CrossRefGoogle Scholar
Tian, W.-C., Ho, Y.-H., Chen, C.-H. and Kuo, C.-Y.: Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography. Sensors 13, 865 (2013).CrossRefGoogle ScholarPubMed
Fang, Q., Chetwynd, D.G., Covington, J.A., Toh, C.S. and Gardner, J.W.: Micro-gas-sensor with conducting polymers. Sensors and Actuators B: Chemical 84, 66 (2002).CrossRefGoogle Scholar
Li, C.-L., Chen, Y.-F., Liu, M.-H. and Lu, C.-J.: Utilizing diversified properties of monolayer protected gold nano-clusters to construct a hybrid sensor array for organic vapor detection. Sensors and Actuators B: Chemical 169, 349 (2012).CrossRefGoogle Scholar
Plum, T.J., Saxena, V. and Jessing, J.R.: Design of a MEMS capacitive chemical sensor based on polymer swelling, in Microelectronics and Electron Devices, 2006. WMED '06. 2006 IEEE Workshop on (2006), pp. 2 pp.Google Scholar
Baltes, H., Lange, D. and Koll, A.: The electronic nose in Lilliput. Spectrum, IEEE 35, 35 (1998).CrossRefGoogle Scholar
Lang, H.P., Berger, R., Battiston, F., Ramseyer, J.P., Meyer, E., Andreoli, C., Brugger, J., Vettiger, P., Despont, M., Mezzacasa, T., Scandella, L., Güntherodt, H.J., Gerber, C. and Gimzewski, J.K.: A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors. Appl Phys A 66, S61 (1998).CrossRefGoogle Scholar
Maute, M., Raible, S., Prins, F.E., Kern, D.P., Ulmer, H., Weimar, U. and Göpel, W.: Detection of volatile organic compounds (VOCs) with polymer-coated cantilevers. Sensors and Actuators B: Chemical 58, 505 (1999).CrossRefGoogle Scholar
Lerchner, J., Seidel, J., Wolf, G. and Weber, E.: Calorimetric detection of organic vapours using inclusion reactions with organic coating materials. Sensors and Actuators B: Chemical 32, 71 (1996).CrossRefGoogle Scholar
Comini, E., Cristalli, A., Faglia, G. and Sberveglieri, G.: Light enhanced gas sensing properties of indium oxide and tin dioxide sensors. Sensors and Actuators B: Chemical 65, 260 (2000).CrossRefGoogle Scholar
Tien, L.C., Sadik, P.W., Norton, D.P., Voss, L.F., Pearton, S.J., Wang, H.T., Kang, B.S., Ren, F., Jun, J. and Lin, J.: Hydrogen sensing at room temperature with Pt-coated ZnO thin films and nanorods. Applied Physics Letters 87, 22106 (2005).CrossRefGoogle Scholar
Arnold, S.P., Prokes, S.M., Perkins, F.K. and Zaghloul, M.E.: Design and performance of a simple, room-temperature Ga2O3 nanowire gas sensor. Applied Physics Letters 95 (2009).CrossRefGoogle Scholar
Young-Jin, C., In-Sung, H., Jae-Gwan, P., Kyoung Jin, C., Jae-Hwan, P. and Jong-Heun, L.: Novel fabrication of an SnO 2 nanowire gas sensor with high sensitivity. Nanotechnology 19, 095508 (2008).Google Scholar
Anothainart, K., Burgmair, M., Karthigeyan, A., Zimmer, M. and Eisele, I.: Light enhanced NO2 gas sensing with tin oxide at room temperature: conductance and work function measurements. Sensors and Actuators B: Chemical 93, 580 (2003).CrossRefGoogle Scholar
Fan, S.-W., Srivastava, A.K. and Dravid, V.P.: UV-activated room-temperature gas sensing mechanism of polycrystalline ZnO. Applied Physics Letters 95, 142106 (2009).CrossRefGoogle Scholar
Tian, W.-C., Ho, Y.-H. and Chou, C.-H.: Photoactivated TiO2 Gas Chromatograph Detector for Diverse Chemical Compounds Sensing at Room Temperature. Sensors Journal, IEEE 13, 1725 (2013).CrossRefGoogle Scholar
Shapira, Y., Cox, S.M. and Lichtman, D.: Photodesorption from powdered zinc oxide. Surface Science 50, 503 (1975).CrossRefGoogle Scholar
Shapira, Y., McQuistan, R.B. and Lichtman, D.: Relationship between photodesorption and surface conductivity in ZnO. Physical Review B 15, 2163 (1977).CrossRefGoogle Scholar
Comini, E., Faglia, G. and Sberveglieri, G.: Solid state gas sensing, (Springer2009).CrossRefGoogle Scholar
Saura, J.: Gas-sensing properties of SnO2 pyrolytic films subjected to ultrviolet radiation. Sensors and Actuators B: Chemical 17, 211 (1994).CrossRefGoogle Scholar
Comini, E., Faglia, G. and Sberveglieri, G.: UV light activation of tin oxide thin films for NO2 sensing at low temperatures. Sensors and Actuators B: Chemical 78, 73 (2001).CrossRefGoogle Scholar