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Piezoelectric Films and Coatings for Device Purposes

Published online by Cambridge University Press:  10 February 2011

Michael Sayer ,
Marc Lukacs ,
Tim Olding ,
Guofeng Pang ,
Lichun Zou  and
Yan Chen
Michael Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Marc Lukacs
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Tim Olding
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Guofeng Pang
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Lichun Zou
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Yan Chen
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
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Abstract

Piezoelectric devices generally require film thicknesses in the range 2-200µm and have a response which is perturbed by the substrate. Sol gel and sol gel composite technology provide a manufacturable process for many purposes with a piezoelectric coupling coefficient for 40ptm thick PZT approaching kt= 0.34. Techniques such as laser machining or micromolding are required for patterning thick devices. Measurement and applications of piezoelectric coatings in medical imaging, high temperature ultrasonics and flexure devices are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 599
Copyright
Copyright © Materials Research Society 1999

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References

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